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Joseph I. Goldstein, Dale E. Newbury [et al.]. Scanning Electron Microscopy and X-Ray Microanalysis. (2017). (ISBN 978-1-4939-6674-5). (ISBN 978-1-4939-6676-9). (DOI 10.1007978-1-4939-6676-9).pdf
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\424 Chapter 24 · Compositional Mapping

Log10 Counts

Counts

Al

1000000

NiL

 

 

 

 

 

 

 

 

 

 

FINAL_-1900u-Mask_

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

highFe_phase

 

 

 

NiL

+ Al

 

 

 

 

 

Ni

 

 

 

 

100000

 

 

 

 

 

Fe

 

 

 

 

 

 

Al +

Al

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

10000

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

1000

 

 

 

 

 

Al Fe Ni

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

100

 

 

 

 

 

 

 

 

 

 

 

 

 

0

1

2

3

4

 

6

7

8

9

10

50000

 

 

 

20 µm

 

 

 

 

 

 

 

FINAL_-1900u-Mask_

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

45000

 

 

 

 

 

 

 

 

 

 

 

highFe_phase

 

 

 

+ Al

 

 

 

 

 

 

 

 

 

 

40000

 

 

 

 

 

 

 

 

 

 

 

 

35000

 

 

Al

 

 

 

 

 

 

 

 

 

 

 

NiL

 

 

 

 

 

 

 

 

 

 

 

30000

 

 

 

 

 

 

 

 

 

 

 

 

25000

 

+

 

Fe mask

 

 

 

 

 

 

 

 

 

 

Al

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

20000

 

 

 

 

 

 

 

 

 

 

 

 

 

15000

 

 

 

 

 

 

 

 

 

 

 

 

 

10000

 

 

 

 

 

 

 

 

 

 

 

 

 

5000

 

 

 

 

 

 

 

 

 

 

 

 

 

0

 

 

 

 

 

 

 

 

 

 

 

 

 

0

1

2

3

4

5

6

7

8

9

10

Photon Energy (keV)

. Fig. 24.10  Creation of a pixel mask (inset) using the Fe elemental map for Raney nickel to select pixels from which a SUM spectrum is constructed for the Fe-rich phase

24.3\ Quantitative Compositional Mapping

The XSI contains the complete EDS spectrum at each pixel (or the position-tagged photon database that can be used to reconstruct the individual pixel spectra). Quantitative compositional mapping implements the normal fixed measurement location quantitative analysis procedure at every pixel in a map. Qualitative analysis is first performed to identify the peaks in the SUM and MAXIMUM PIXEL spectra of the XSI to determine the suite of elements present within the mapped area, noting that all elements are unlikely to be present at every pixel. The pixel-level EDS spectra can then be individually processed following the same quantitative analysis protocol used for individually measured spectra, ultimately replacing the gray or color scale in total intensity elemental maps, which are based on raw X-ray intensities and which are nearly impossible to compare, with a gray or color scale based on the calculated concentrations, which can be sensibly compared. Most vendor compositional mapping software extracts characteristic peak intensities by applying multiple linear

24 least squares (MLLS) peak fitting or alternatively fits a background model under the peaks. These extracted pixel-level

elemental intensities are then quantified by a “standardless analysis” procedure to calculate the individual pixel concentration values. Alternatively, rigorous standards-based quantitative analysis can be performed on the pixel-level intensity data with NIST DTSA II by utilizing the scripting language to sequentially calculate the pixel spectra in a datacube. MLLS peak fitting to extract the characteristic intensities, k-ratio calculation relative to a library of measured standards, and matrix corrections to yield the local concentrations of these elements for each pixel. An example of the NIST DTSA-II procedure applied to an XSI measured on the manganese nodule example of .Fig. 24.2 is presented in .Fig. 24.11, where the Fe K-L2,3 total intensity map, which suffers significant interference from Mn K-M2,3, shows a change in the apparent level of Fe in the center of the image after quantitative correction, as well as changes in several finer-scale details.

Quantitative compositional maps for major constituents displayed as gray-scale images are virtually identical to raw intensity elemental maps, as shown for the major constituents Al and Ni in .Figs. 24.12 and 24.13. Significant differences between raw intensity maps and compositional maps are found for minor and trace constituents, where correction

24.3 · Quantitative Compositional Mapping

. Fig. 24.11  Quantitative compositional mapping with DTSA-II on the XSI of a deepsea manganese nodule from

.Fig. 24.2: direct comparison of the total intensity map for Fe and the quantitative compositional map of Fe; note the decrease in the apparent Fe in the high Mn portion in the center of the image after quantification and local changes indicated by arrows (yellow shows extension of high Fe region; magenta shows elimination of dark features)

425

 

24

 

 

 

Raw Fe K-L2,3 + Mn K-M2,3

Fe K-L2,3 after DTSA-II quantification

20 µm

for the continuum background significantly changes the gray-scale image. As shown for the minor Fe constituent in

.Figs. 24.12 and 24.13, the false Fe contrast between the Nirich and Al-rich phases that arises due to the atomic number dependence of the X-ray continuum is eliminated in the Fe compositional map.

While rendering the underlying pixel data of quantitative compositional maps in gray scale is a useful starting point, the problem of achieving a quantitatively meaningful display remains. Because of autoscaling, the gray scales of the Al, Ni, and Fe maps in .Fig. 24.12 do not have the same numerical meaning. The Al and Ni concentrations locally reach high enough levels to correspond to brighter gray levels and have sufficient range to create strong contrast with direct gray-scale encoding, as seen in .Figs. 24.12 and 24.13. The Fe constituent­ which is present at a concentration with a maximum of approximately 0.04 mass fraction (4 wt %) never exceeds the minor constituent range, so the Fe map appears dark with little contrast in the quantitative map of .Fig. 24.13. Autoscaling of the Fe-map in

.Fig. 24.14 improves the contrast, but the same limitations

of autoscaling noted above still apply. Various pseudo-color scales, in which bands of contrasting colors are applied to the underlying data, are typically available in image processing software. Such pseudo-color scale can partially overcome the display limitations of gray-scale presentation, but the resulting images are often difficult to interpret. An example of a five band pseudo-color scale applied to the compositional maps using NIST Lispix is shown in

.Fig. 24.15. An effective display scheme for quantitative elemental maps that enables a viewer to readily compare concentrations of different elements spanning major, minor and trace ranges can be achieved with the Logarithmic Three-Band Encoding (Newbury and Bright 1999). A band of colors is assigned to each decade of the concentration range with the following characteristics:

Major: C > 0.1 to 1 (mass fraction) deep red to red pastel

Minor: 0.01 C 0.1 deep green to green pastel Trace: 0.001 C < 0.01 deep blue to blue pastel

The quantitative elemental maps are displayed with Logarithmic Three-Band Encoding in .Fig. 24.16, and the

\426 Chapter 24 · Compositional Mapping

Al

 

Fe

 

 

 

20 µm

Ni

 

Al Fe Ni

 

 

 

. Fig. 24.12  Raney nickel alloy XSI: total intensity maps for Al, Fe, and Ni with color overlay

Al

Fe

20 µm

Ni

Al Fe Ni

24

. Fig. 24.13  Quantitative compositional maps of the Raney nickel alloy XSI in 24.13; note low contrast in the Fe image presented without

autoscaling

427

24

24.3 · Quantitative Compositional Mapping

Al

 

Fe

 

 

 

20 µm

Ni

 

Al Fe Ni

 

 

 

. Fig. 24.14  Quantitative compositional maps Raney nickel alloy XSI with contrast enhancement of the Fe map

Al

Fe

20 µm

Ni

0

50

100

150

200

255

. Fig. 24.15  Five band pseudo-color presentation of the quantitative compositional maps for Al, Fe, and Ni derived from the Raney nickel alloy XSI

\428 Chapter 24 · Compositional Mapping

major-minor-trace spatial relationships among the elemental constituents are readily discernible.

The Logarithmic Three-Band Encoding of the Fe compositional map in .Fig. 24.16 reveals apparent Fe contrast in the Al-rich and Fe-rich phases, and this contrast differs markedly

from the atomic-number dependence of the X-ray continuum seen in the raw Fe intensity image, as shown in .Fig. 24.17. The Logarithmic Three-Band Encoding shows that this apparent contrast occurs near the lower limit of the trace range. Is this trace Fe contrast meaningful or merely an uncorrected

BSE

 

Al

 

 

 

Ni

Fe

 

 

20 µm

0.001

0.01

0.1

1.0

0.1

1.0

10

100 wt%

. Fig. 24.16  Logarithmic Three-Band Color encoding of the quantitative compositional maps for Al, Fe, and Ni derived from the Raney nickel alloy XSI

Fe

Fe

20 µm

Fe raw intensity elemental map

0.001

0.01

0.1

1.0

0.1

1.0

10

100 wt%

Fe compositional map

24

. Fig. 24.17  Direct comparison of the Fe total intensity map and the Logarithmic Three-Band Encoding of the Fe quantitative compositional

 

map. Note the distinct changes in the contrast within the trace concentration (C < 0.01) regions of the image

 

24.3 · Quantitative Compositional Mapping

1000000

(Log)

100000

 

Counts

10000

 

 

1000

 

100

0

 

24000

 

22000

 

20000

 

18000

Counts

16000

14000

 

12000

10000

8000

6000

4000

2000

0

0

1 2

1 2

429

 

24

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

3

4

5

6

7

8

9

10

 

 

Energy (keV)

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

3

4

5

6

7

8

9

10

 

 

Energy (keV)

 

 

 

 

 

. Fig. 24.18  Raney nickel alloy XSI: mask of pixels corresponding to the Fe-rich phase and the corresponding SUM spectrum; the Fe peak corresponds to C=0.044 mass fraction

artifact? To examine this question, the analyst can use pixel masks of each phase selected from the Ni compositional map (or the BSE image) to obtain the SUM spectrum, as shown in

.Figs. 24.18 (Fe-rich phase), 24.19 (Al-rich phase), 24.20 (Ni-intermediate phase), and 24.21 (Ni-rich phase). These SUM spectra confirm that Fe is indeed present as a trace

constituent, with its highest level in the intermediate-Ni phase where CFe = 0.0027 (2700 ppm), falling to CFe = 0.00038 (380 ppm) in the high-Ni phase and to CFe = 0.00030 (300 ppm) in the high-Al phase. Additionally, trace Cr at a similar concentration is found in the Al-rich phase along with the trace Fe.